PFA In-Line Heater
Precise Temp Control for High-Purity Chemicals
This PFA ultra-pure in-line chemical heater is specifically designed for high-purity fluid heating applications such as semiconductor wet processes, photovoltaic wafer cleaning, and precision electronic sterilization and cleaning. All parts of the unit that come into contact with liquids are made of high-purity PFA/PTFE fluoroplastic, and the heating elements are fully encased in PFA, ensuring that no metal components come into contact with the chemical solution.
- Standard Power Specifications: 4 KW, 6 KW; Custom Options: 6–18 KW
- Operating Voltage: 110–415 V (compatible with both single-phase and three-phase power; supports a wide voltage range of 120–600 V)
- Compatible Fluids: Ultrapure water, mildly corrosive acids and alkalis, high-purity semiconductor cleaning solutions
- Temperature Control Components: Process thermocouple + over-temperature thermocouple; supports integration with an external PID temperature controller
Product Description
The equipment features a vertical, series-connected piping configuration with smooth, dead-end-free internal flow channels. It does not leach metal ions or cause particulate contamination during operation, fully meeting the ultra-high-purity process standards of the semiconductor and photovoltaic industries. The low-power-density heating element design ensures fast temperature response and high thermal efficiency, allowing direct integration into existing cleaning circulation piping and supporting 24-hour continuous mass production operations.
Applications
- Semiconductor Manufacturing Industry: Wet cleaning processes, wafer etching, heating of photolithography chemicals, MEMS chip cleaning, and heating of high-purity and ultra-pure water circulation systems.
- Photovoltaic and New Energy Industries: Cleaning and texturing of solar PV wafers, heating of deionized water circulation systems, and constant-temperature heating of wafer etching solutions.
- Electronics PCB/FPC Industry: Circuit board acid washing, preheating of chemicals prior to electroplating tanks, and sterilization and cleaning of precision electronic components.
- Other Industries: Constant-temperature heating of high-purity chemicals in laboratories; heating of sterilization fluids in life sciences; and heating of precision chemical etching solutions.
Advantages
- High-purity Process Design,Suitable for High-purity Operating Conditions: The flow channels have no metal-to-solution contact, reducing the leaching of ions and particles and lowering the probability of wafer cleaning defects; suitable for high-purity fluid processes in the semiconductor and photovoltaic industries.
- Excellent Corrosion Resistance, Compatible with A Wide Range of Media: The entire unit is constructed of PFA material, making it suitable for deionized water, various acids, alkalis, and organic solvents; it resists swelling, cracking, and aging even during long-term contact with corrosive solutions.
- Multiple Safety Protections Ensure More Stable Operation: Standard features include a flow-based dry-run protection sensor, a thermocouple for fluid temperature measurement, and over-temperature power-off protection for the heating element. The entire unit is grounded and complies with CE safety standards.
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